Hafnium oxide HfO2 ceramic target
Hafnium Oxide (HfO₂) Sputtering Target, also known as hafnium dioxide ceramic target, is a premium-grade material used for thin film deposition in semiconductor, photonic, and advanced coating applications. HfO₂ is valued for its high dielectric constant, excellent thermal stability, and chemical resistance, making it a preferred material for forming high-k gate dielectrics, optical films, and protective layers in microelectronics.
Princeton Powder offers high-purity HfO₂ ceramic sputtering targets with purity levels up to 99.99%, optimized for RF magnetron sputtering, reactive sputtering, and other PVD (physical vapor deposition) processes. These targets are manufactured using advanced ceramic sintering techniques to ensure high density, uniform grain structure, and low impurity content for superior thin film performance.
Material | Hafnium Oxide Sputtering Target |
Product Code | HF021 |
Purity | 99.95%, 4N |
Shape | Discs, Rectangle, Rods, Pellets, Irregular, Custom-Made |
| Density | 9.68 g/cm3 |
Melting Point | 2758 ℃ |
Dimensions | Round sputtering target: |
Bonding | With/No Bonding, or customized |
Backing Material | Indium |
Description of Hafnium Oxide Sputtering Target
Hafnium oxide (HfO₂) sputtering targets are widely used in semiconductor manufacturing, optical coatings, and thin film deposition processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) for displays and microelectronics. We are a trusted supplier of high-purity hafnium oxide sputtering targets, offering custom sizes and competitive prices to meet diverse industrial and research needs.
Dimensions of Hafnium Oxide Sputtering Target
Circular Sputtering Targets | Diameter | 1.0” 2.0” 3.0” 4.0” 5.0” 6.0” Customized |
Rectangular Sputtering Targets | Width x Length | 5” x 12” 5” x 15” 5” x 20” 5” x 22” 6” x 20” Customized |
Thickness can be customized (With/No Bonding) | 0.125”, 0.25”, Customized | |
Available Bonding Options of Hafnium Oxide Target
- Indium bonding for thermal conductivity
- Silver epoxy bonding for strong adhesion
- Diffusion bonding for high-power sputtering environments
- Compatible backing plates: OFHC copper, titanium, molybdenum, aluminum
Hafnium Oxide Sputtering Target Application
- High-k dielectric layers in semiconductors and CMOS devices
- Optical coatings for high-refractive index films
- Protective layers in aerospace and corrosion-resistant coatings
- Transparent insulating films in optoelectronic devices
- Photonic and laser systems requiring low-defect ceramic layers
HfO2 Ceramic Target Scholar Articles
Growth, microstructure and electrical properties of sputter-deposited hafnium oxide (HfO2) thin films grown using a HfO2 ceramic target
Abstract: Hafnium oxide (HfO2) thin films have been made by radio-frequency (rf) magnetron-sputtering onto Si(1 0 0) substrates under varying growth temperature (Ts). HfO2 ceramic target has been employed for sputtering while varying the Ts from room temperature to 500 °C during deposition. The effect of Ts on the growth and microstructure of deposited HfO2 films has been studied using grazing incidence X-ray diffraction (GIXRD), and high-resolution scanning electron microscopy (HR-SEM) coupled with energy dispersive X-ray spectrometry (EDS).
FAQ – Hafnium Oxide (HfO₂) Sputtering Target
What purity grades are available for HfO₂ targets?
We offer 99.9%, 99.95%, and 99.99% purity hafnium oxide ceramic sputtering targets to meet both standard and high-end application needs.
What sputtering methods are compatible with HfO₂ targets?
HfO₂ is primarily used with RF magnetron sputtering, but is also suitable for reactive sputtering in oxygen atmospheres.
Can you provide custom sizes and bonded targets?
Yes, we provide customized sizes, thicknesses, and bonding configurations to fit your sputtering system and technical requirements.
What are the main applications of HfO₂ thin films?
HfO₂ thin films are used in CMOS transistors, high-k dielectric layers, optical coatings, and thermal barrier coatings.
How should HfO₂ ceramic targets be stored or handled?
Store in a dry, clean environment, handle with care to prevent cracking, and avoid moisture absorption before bonding or use.